Anodically bonded submicron microfluidic chambers
We demonstrate the use of anodic bonding to fabricate cells with characteristic size as large as 7Ã—10mm2, with height of â‰ˆ640 nm, and without any internal support structure. The cells were fabricated from Hoya SD-2 glass and silicon wafers, each with 3 mm thickness to maintain dimensional stability under internal pressure. Bonding was carried out at 350 Â°C and 450 V with an electrode structure that excluded the electric field from the open region. We detail fabrication and characterization steps and also discuss the design of the fill line for access to the cavity. Â© 2010 American Institute of Physics.