Skip to main content

Two-dimensional nanoelectromechanical systems (2D NEMS) via atomically-thin semiconducting crystals vibrating at radio frequencies

Cornell Affiliated Author(s)

Author

P.X.-L. Feng
Z. Wang
J. Lee
R. Yang
X. Zheng
K. He
J. Shan

Abstract

We report on the initial explorations of engineering atomically-thin semiconducting crystals into a new class of two-dimensional nanoelectromechanical systems (2D NEMS) that are attractive for realizing ultimately thin 2D transducers for embedding in both planar and curved systems. We describe the first resonant NEMS operating at radio frequencies (RF), based on MoS2, a hallmark of 2D semiconducting crystals derived from layered materials in transition metal dichalcogenides (TMDCs). Through a series of careful measurements and analyses, we demonstrate a family of MoS2 2D NEMS resonators possessing very high fundamental-mode frequencies (f0∼120MHz, in the VHF band), very broad dynamic range (DR∼70-110dB), rich nonlinear dynamics, and outstanding electrical tunability. © 2014 IEEE.

Date Published

Conference Name

2014 IEEE International Electron Devices Meeting

Publisher

IEEE

Conference Location

San Francisco, CA, USA

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84938281622&doi=10.1109%2fIEDM.2014.7047008&partnerID=40&md5=b1819aa48a718db573b83d3622022417

DOI

10.1109/IEDM.2014.7047008

Group (Lab)

Jie Shan Group

Funding Source

ECCS-0335765

Download citation