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Electrically tunable single- and few-layer MoS2 nanoelectromechanical systems with broad dynamic range

Cornell Affiliated Author(s)

Author

J. Lee
Z. Wang
K. He
R. Yang
J. Shan
P.X.-L. Feng

Abstract

Atomically thin semiconducting crystals [such as molybdenum disulfide (MoS2)] have outstanding electrical, optical, and mechanical properties, thus making them excellent constitutive materials for innovating new two-dimensional (2D) nanoelectromechanical systems (NEMS). Although prototype structures have recently been demonstrated toward functional devices such as ultralow-power, high-frequency tunable oscillators and ultrasensitive resonant transducers, both electrical tunability and large dynamic range (DR) are critical and desirable. We report the first experimental demonstration of clearly defined single-, bi-, and trilayer MoS2 2Dresonant NEMS operating inthe very high frequency band (up to ∼120 MHz) with outstanding electrical tunability and DR. Through deterministic measurement and calibration, we discover that these 2D atomic layer devices have remarkably broad DR (up to ∼70 to 110 dB), in contrast to their 1D NEMS counterparts that are expected to have limited DR. These 2D devices, therefore, open avenues for efficiently tuning and strongly coupling the electronic, mechanical, and optical properties in atomic layer semiconducting devices and systems. © 2018 The Authors.

Date Published

Journal

Science Advances

Volume

4

Issue

3

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85044785558&doi=10.1126%2fsciadv.aao6653&partnerID=40&md5=404b15bc6f1b9a9d109815b7b3014882

DOI

10.1126/sciadv.aao6653

Group (Lab)

Jie Shan Group

Funding Source

0907477
DMR-0907477
61774029

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